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conference paper
FIB and DRIE combination for nanotip fabrication
2005
5th Spanish Conference on Electron Devices (CDE)
Type
conference paper
Authors
•
Plaza, J. A.
•
Sanchez-Amores, A.
•
Bausells, J.
•
Martinez, E.
•
Samitier, J.
•
Errachid, A.
Publication date
2005
Published in
5th Spanish Conference on Electron Devices (CDE)
Start page
443
End page
446
Note
Times Cited: 0, 5th Spanish Conference on Electron Devices, FEB 02-04, 2005, Tarragona, SPAIN
Peer reviewed
REVIEWED
EPFL units
Event name | Event place | Event date |
Tarragona, Spain | 2005 | |
Available on Infoscience
August 6, 2013
Use this identifier to reference this record