FIB and DRIE combination for nanotip fabrication


Published in:
5th Spanish Conference on Electron Devices (CDE), 443-446
Presented at:
5th Spanish Conference on Electron Devices (CDE), Tarragona, Spain, 2005
Year:
2005
Note:
Times Cited: 0, 5th Spanish Conference on Electron Devices, FEB 02-04, 2005, Tarragona, SPAIN
Laboratories:




 Record created 2013-08-06, last modified 2018-09-13


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