DRIE and FIB combination for nanotip fabrication


Published in:
30th International Conference on Micro- and Nano- Engineering (MNE), 443-446
Presented at:
30th International Conference on Micro- and Nano- Engineering (MNE), Rotterdam, 2004
Year:
2004
Laboratories:




 Record created 2013-08-06, last modified 2018-09-13


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