Crystalline silicon cantilevers for piezoresistive detection of biomolecular forces

In order to obtain a sensor with force resolution better than 100 pN for biomolecular detection, U-shaped piezoresistive cantilevers made of crystalline silicon have been fabricated. The resistors have been defined by ionic implantation of As+, yielding a shallow and thin resistor and they have been patterned parallel to the (100) crystallographic direction, attaining a maximum for the piezoresistive factor. The sensitivity of the devices is characterized together as the force resolution, being both of them 60 mu V/pN and 65 pN, respectively, for a cantilever with a length of 250 mu m, a width of 8 mu m and a thickness of 340 nm. (C) 2008 Elsevier B.V. All rights reserved.


Published in:
Microelectronic Engineering, 85, 5-6, 1120-1123
Year:
2008
Publisher:
Elsevier
ISSN:
0167-9317
Keywords:
Note:
Bausells, J Ctr Natl Microelect, IMB CSIC, Bellaterra 08193, Spain Ctr Natl Microelect, IMB CSIC, Bellaterra 08193, Spain Ecole Polytech Fed Lausanne, Microsyst Lab, CH-1015 Lausanne, Switzerland, 322ZI, Times Cited:0, Cited References Count:14
Laboratories:




 Record created 2013-08-06, last modified 2018-03-18


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