Infoscience

Conference paper

Polysilicon piezoresistive cantilevers for intermolecular force detection

    Note:

    Times Cited: 0, 5th Spanish Conference on Electron Devices, FEB 02-04, 2005, Tarragona, SPAIN

    Reference

    • EPFL-CONF-187894

    Record created on 2013-08-06, modified on 2017-02-12

Fulltext

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