Polymer microoptoelectromechanical systems: Variable optical attenuators and accelerometers


Published in:
14th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), Poster, U544-U545
Presented at:
14th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), Lyon, France, 2007
Year:
2007
ISBN:
978-1-4244-0841-2
Note:
Llobera, A. Villanueva, G. Cadarso, V. J. Seidemann, V. Buettgenbach, S. Plaza, J. A., 14th International Conference on Solid-State Sensors, Actuators and Microsystems, JUN 10-14, 2007, Lyon, FRANCE
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 Record created 2013-08-06, last modified 2018-09-13


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