Infoscience

Conference paper

Polymer microoptoelectromechanical systems: Variable optical attenuators and accelerometers

    Note:

    Llobera, A. Villanueva, G. Cadarso, V. J. Seidemann, V. Buettgenbach, S. Plaza, J. A., 14th International Conference on Solid-State Sensors, Actuators and Microsystems, JUN 10-14, 2007, Lyon, FRANCE

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    Record created on 2013-08-06, modified on 2016-08-09

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