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research article

Polymeric MOEMS variable optical attenuator

Llobera, A.
•
Villanueva, G.  
•
Cadarso, V. J.
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2006
IEEE Photonics Technology Letters

In this letter, we take advantage of the high coefficient of thermal expansion (CTE) of a chemically amplified, epoxy-based negative polymer (SU-8) to define a low-power consumption polymeric variable optical attenuator that combines the working principles of microoptoelectromechanical systems and photonic light-wave circuits. The SU-8 symmetric structure comprises a seismic mass and four mechanical beams. Three multimode waveguides are defined on this structure: two of them are located on the frame and the third one in the middle of the seismic mass. Aluminum is used as a heater electrode extending over two of the mechanical beams and part of the seismic mass. When a dc voltage is applied, the mechanical beams bend, resulting in a misalignment between the waveguides. Experimental results have shown a power consumption of 12 mW at 20 dB with a working wavelength of 633 nm emitted from a light-emitting diode.

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Type
research article
DOI
10.1109/Lpt.2006.886134
Web of Science ID

WOS:000243173300078

Author(s)
Llobera, A.
Villanueva, G.  
Cadarso, V. J.
Buttgenbach, S.
Plaza, J. A.
Date Issued

2006

Published in
IEEE Photonics Technology Letters
Volume

18

Issue

21-24

Start page

2425

End page

2427

Subjects

electrothermal actuators

•

microoptoelectromechanical systems (moems)

•

polymer waveguides

•

variable optical attenuators (voas)

•

wave-guide

•

power

Note

Llobera, A Tech Univ Carolo Wilhelmina Braunschweig, Inst Mikrotech, D-38124 Braunschweig, Germany Tech Univ Carolo Wilhelmina Braunschweig, Inst Mikrotech, D-38124 Braunschweig, Germany CSIC, Inst Microelect, Barcelona, Spain

121QY

Cited References Count:13

URL

URL

http://ieeexplore.ieee.org/ielx5/68/36134/04012066.pdf?tp=&arnumber=4012066&isnumber=36134
Editorial or Peer reviewed

REVIEWED

Written at

OTHER

EPFL units
NEMS  
Available on Infoscience
August 6, 2013
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/93820
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