Polymeric MOEMS variable optical attenuator

In this letter, we take advantage of the high coefficient of thermal expansion (CTE) of a chemically amplified, epoxy-based negative polymer (SU-8) to define a low-power consumption polymeric variable optical attenuator that combines the working principles of microoptoelectromechanical systems and photonic light-wave circuits. The SU-8 symmetric structure comprises a seismic mass and four mechanical beams. Three multimode waveguides are defined on this structure: two of them are located on the frame and the third one in the middle of the seismic mass. Aluminum is used as a heater electrode extending over two of the mechanical beams and part of the seismic mass. When a dc voltage is applied, the mechanical beams bend, resulting in a misalignment between the waveguides. Experimental results have shown a power consumption of 12 mW at 20 dB with a working wavelength of 633 nm emitted from a light-emitting diode.


Published in:
IEEE Photonics Technology Letters, 18, 21-24, 2425-2427
Year:
2006
ISSN:
1041-1135
Keywords:
Note:
Llobera, A Tech Univ Carolo Wilhelmina Braunschweig, Inst Mikrotech, D-38124 Braunschweig, Germany Tech Univ Carolo Wilhelmina Braunschweig, Inst Mikrotech, D-38124 Braunschweig, Germany CSIC, Inst Microelect, Barcelona, Spain
121QY
Times Cited:0
Cited References Count:13
Laboratories:




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