Polymeric MOEMS variable optical attenuator
In this letter, we take advantage of the high coefficient of thermal expansion (CTE) of a chemically amplified, epoxy-based negative polymer (SU-8) to define a low-power consumption polymeric variable optical attenuator that combines the working principles of microoptoelectromechanical systems and photonic light-wave circuits. The SU-8 symmetric structure comprises a seismic mass and four mechanical beams. Three multimode waveguides are defined on this structure: two of them are located on the frame and the third one in the middle of the seismic mass. Aluminum is used as a heater electrode extending over two of the mechanical beams and part of the seismic mass. When a dc voltage is applied, the mechanical beams bend, resulting in a misalignment between the waveguides. Experimental results have shown a power consumption of 12 mW at 20 dB with a working wavelength of 633 nm emitted from a light-emitting diode.
- URL: http://ieeexplore.ieee.org/search/wrapper.jsp?arnumber=4012066
- URL: http://ieeexplore.ieee.org/ielx5/68/36134/04012066.pdf?tp=&arnumber=4012066&isnumber=36134
Llobera, A Tech Univ Carolo Wilhelmina Braunschweig, Inst Mikrotech, D-38124 Braunschweig, Germany Tech Univ Carolo Wilhelmina Braunschweig, Inst Mikrotech, D-38124 Braunschweig, Germany CSIC, Inst Microelect, Barcelona, Spain
Cited References Count:13
Record created on 2013-08-06, modified on 2017-02-12