Polymer microoptoelectromechanical systems: Accelerometers and variable optical attenuators
This paper presents the design, fabrication and characterization of polymer microoptoelectromechanical systems (MOEMS). An optical accelerometer and a variable optical attenuator (VOA) based on SU-8 are presented. Both devices consist on a quad-beam polymer structure and can be fabricated with a simple technology, requiring only two photolithographic steps. Self-alignment structures for fast and accurate fiber optic positioning have also been implemented in both devices. The accelerometer working principle consists on a misalignment between the three waveguides, which comprise the structure, as acceleration is applied. Experimental optical sensitivities of 13.1 dB/g for negative and 17.5 dB/g for positive accelerations, and a high repeatability in an uncontrolled atmosphere are observed. Using the same devices and taking advantage of the high thermal expansion (CTE) of the SU-8, it is possible to obtain a low-power consumption VOA. Experimental results show an attenuation of 20 dB for a power consumption of 12mW. (c) 2007 Elsevier B.V. All rights reserved.
Keywords: microoptomechanical systems (moems) ; polymer technology ; su-8 ; optical accelerometers ; electrothermal actuators ; variable optical attermators (voa) ; embedded micro-channels ; wave-guide ; silicon ; fabrication ; photoresist ; technology
Cadarso, VJ CSIC, Inst Microelect, Campus UAB, Barcelona 08193, Spain CSIC, Inst Microelect, Barcelona 08193, Spain Tech Univ Carolo Wilhelmina Braunschweig, Inst Mikrotech, D-38124 Braunschweig, Germany
Sp. Iss. SI
Cited References Count:27
Record created on 2013-08-06, modified on 2017-02-12