Sharp High-Aspect-Ratio AFM Tips Fabricated by a Combination of Deep Reactive Ion Etching and Focused Ion Beam Techniques
The shape and dimensions of an atomic force microscope tip are crucial factors to obtain high resolution images at the nanoscale. When measuring samples with narrow trenches, inclined sidewalls near 90 or nanoscaled structures, standard silicon atomic force microscopy (AFM) tips do not provide satisfactory results. We have combined deep reactive ion etching (DRIE) and focused ion beam (FIB) lithography techniques in order to produce probes with sharp rocket-shaped silicon AFM tips for high resolution imaging. The cantilevers were shaped and the bulk micromachining was performed using the same DRIE equipment. To improve the tip aspect ratio we used FIB nanolithography technique. The tips were tested on narrow silicon trenches and over biological samples showing a better resolution when compared with standard AFM tips, which enables nanocharacterization and nanometrology of high-aspect-ratio structures and nanoscaled biological elements to be completed, and provides an alternative to commercial high aspect ratio AFM tips.
Keywords: deep reactive ion etching ; focused ion beam lithography ; high-aspect-ratio ; atomic force microscopy ; atomic-force microscope ; carbon nanotube tips ; probes ; roughness ; cells ; microfabrication ; calibration ; surfaces
Caballero, D Inst Bioengn Catalonia, Nanobioengn Grp, Barcelona Sci Pk,C Baldiri Reixac 10-12, Barcelona 08028, Spain Inst Bioengn Catalonia, Nanobioengn Grp, Barcelona Sci Pk,C Baldiri Reixac 10-12, Barcelona 08028, Spain Inst Bioengn Catalonia, Nanobioengn Grp, Barcelona 08028, Spain CIBER BBN, Zaragoza 50018, Spain Univ Autonoma Barcelona, Ctr Nacl Microelect, IMB CSIC, E-08193 Barcelona, Spain Univ Barcelona, Dept Elect, E-08028 Barcelona, Spain
Cited References Count:26
Record created on 2013-08-06, modified on 2016-08-09