Device for converting a first motion into a second motion responsive to said first motion under a demagnification scale
The present invention discloses a device (CD) for converting a first motion (x s ) into a second motion ( y) responsive to said first movement (x s ) under a demagnification scale (i), comprising: a) an input portion (IP) being drivable in a rectilinear translation in a first direction (x) by an actuator (AC) causing said first motion (x s ); b) an output portion (OP) being movable by a converting blade (CB) causing said second motion ( y) responsive to said first motion (x s ) in a second direction (y) substantially perpendicular to said first direction (x); and c) a converting section (CS) connecting said input portion (IP) to said output portion (OP); said converting section (CS) comprising an intermediate spring portion (ITP) and the converting blade (CB), c1) wherein said intermediate spring portion (ITP) comprises at least two parallel flexure blades (FB1, FB2); and c2) wherein said converting blade (CB) being substantially identical in shape to the a least two parallel flexure blades (FB1, FB2) and being offset from its neutral position by a predetermined amount (x 0 ) in the first direction (x) as compared to the neutral position of the at least two parallel flexure blades (FB1, FB2). This device has a flexure-based structure that allows combining the advantages of classical actuators with accuracies in the micrometer range and the advantages of flexures to achieve nanometer accuracy.
Device for converting EP1914194A1.pdf
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