Field effect modulated nanofluidic diode membrane based on Al2O3/W heterogeneous nanopore arrays

We developed Al2O3/W heterogeneous nanopore arrays for field effect modulated nanofluidic diodes. They are fabricated by transferring self-organized nanopores of anodic aluminium oxide into a W thin film. The nanopores are ∼20 nm in diameter and 400 nm in length. After mild oxidation, approximately 10 nm WO3 grows on the surface of W, forming a conformal and dense dielectric layer. It allows the application of an electrical field through the surrounding W electrode to modulate the ionic transport across the entire membrane. Our experimental findings have potential applications in high throughput controlled delivery and electrostatic sorting of biomolecules.


Published in:
Applied Physics Letters, 102, 21, 213108.1-4
Year:
2013
Publisher:
Melville, American Institute of Physics
ISSN:
0003-6951
Keywords:
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 Record created 2013-05-31, last modified 2018-09-13

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