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research article
E-beam lithography and electrodeposition fabrication of thick nanostructured devices
Type
research article
Authors
Lo, T. N.
•
Chen, Y. T.
•
Chiu, C. W.
•
Liu, C. J.
•
Wu, S. R.
•
Lin, I. K.
•
Su, C. I.
•
Chang, W. D.
•
Hwu, Y.
•
Shew, B. Y.
Publication date
2007
Published in
Volume
40
Issue
10
Start page
3172
End page
3176
Subjects
Peer reviewed
REVIEWED
Available on Infoscience
April 25, 2013
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