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Low-NA focused vortex beam lithography for below 100-nm feature size at 405 nm illumination
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Low-NA focused vortex beam lithography for below 1[...]
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Kim, Myun-Sik
et al
main
file(s):
Photonics West 2013_Vortex beam lithography_rev02
version 1
Photonics West 2013_Vortex beam lithography_rev02.pdf
[51.77 KB]
27 Jan 2018, 13:55
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