Dispersion engineering of thick high-Q silicon nitride ring-resonators via atomic layer deposition

• Published in: Optics Express (ISSN: 1094-4087), vol. 20, num. 25, p. 27661-27669
• Washington: Optical Society of America, 2012

We demonstrate dispersion engineering of integrated silicon nitride based ring resonators through conformal coating with hafnium dioxide deposited on top of the structures via atomic layer deposition. Both, magnitude and bandwidth of anomalous dispersion can be significantly increased. The results are confirmed by high resolution frequency-comb-assisted-diode-laser spectroscopy and are in very good agreement with the simulated modification of the mode spectrum. (C) 2012 Optical Society of America

Reference

• EPFL-ARTICLE-185680
• View record in Web of Science

Record created on 2013-03-28, modified on 2017-05-12