Repository logo

Infoscience

  • English
  • French
Log In
Logo EPFL, École polytechnique fédérale de Lausanne

Infoscience

  • English
  • French
Log In
  1. Home
  2. Academic and Research Output
  3. Journal articles
  4. Dispersion engineering of thick high-Q silicon nitride ring-resonators via atomic layer deposition
 
research article

Dispersion engineering of thick high-Q silicon nitride ring-resonators via atomic layer deposition

Riemensberger, Johann
•
Hartinger, Klaus  
•
Herr, Tobias  
Show more
2012
Optics Express

We demonstrate dispersion engineering of integrated silicon nitride based ring resonators through conformal coating with hafnium dioxide deposited on top of the structures via atomic layer deposition. Both, magnitude and bandwidth of anomalous dispersion can be significantly increased. The results are confirmed by high resolution frequency-comb-assisted-diode-laser spectroscopy and are in very good agreement with the simulated modification of the mode spectrum. (C) 2012 Optical Society of America

  • Details
  • Metrics
Type
research article
DOI
10.1364/OE.20.027661
Web of Science ID

WOS:000314746600044

Author(s)
Riemensberger, Johann
Hartinger, Klaus  
Herr, Tobias  
Brasch, Victor  
Holzwarth, Ronald
Kippenberg, Tobias J.  
Date Issued

2012

Publisher

Optical Society of America

Published in
Optics Express
Volume

20

Issue

25

Start page

27661

End page

27669

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LPQM  
Available on Infoscience
March 28, 2013
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/91135
Logo EPFL, École polytechnique fédérale de Lausanne
  • Contact
  • infoscience@epfl.ch

  • Follow us on Facebook
  • Follow us on Instagram
  • Follow us on LinkedIn
  • Follow us on X
  • Follow us on Youtube
AccessibilityLegal noticePrivacy policyCookie settingsEnd User AgreementGet helpFeedback

Infoscience is a service managed and provided by the Library and IT Services of EPFL. © EPFL, tous droits réservés