Microfabricated All-Around-Electrode Ac Electroosmotic Pump With Simple Design And Increased Velocity Generation
AC electroosmosis is a convenient valveless method to pump liquids, whilst avoiding electrolysis and gas generation. Basic designs presented in the literature often have limited velocity or pressure capabilities. This paper reports a simple approach to the design and fabrication of AC electroosmotic (ACEO) micropumps with electrodes that completely surround the channel. We present a fabrication process with two lithographic steps and show that the new prototypes allow for a dramatic increase of the velocity generation - up to 360% compared to devices where electrodes are placed only on one side of the channel.
WOS:000312912800266
2012
978-1-4673-0325-5
New York
4
1057
1060
REVIEWED
Event name | Event place | Event date |
Paris, France | January 29-February 2, 2012 | |