Microfabricated All-Around-Electrode Ac Electroosmotic Pump With Simple Design And Increased Velocity Generation

AC electroosmosis is a convenient valveless method to pump liquids, whilst avoiding electrolysis and gas generation. Basic designs presented in the literature often have limited velocity or pressure capabilities. This paper reports a simple approach to the design and fabrication of AC electroosmotic (ACEO) micropumps with electrodes that completely surround the channel. We present a fabrication process with two lithographic steps and show that the new prototypes allow for a dramatic increase of the velocity generation - up to 360% compared to devices where electrodes are placed only on one side of the channel.


Published in:
25th IEEE International Conference On Micro Electro Mechanical Systems (MEMS)
Presented at:
25th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Paris, France, January 29-February 2, 2012
Year:
2012
Publisher:
New York, IEEE
ISBN:
978-1-4673-0325-5
Laboratories:




 Record created 2013-03-28, last modified 2018-09-13


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