MEMS-based programmable slit masks are developed for multi-object spectroscopy in astronomy. Devices with 2048 tiltable micromirrors were fabricated and tested, exhibiting very good surface flatness, high contrast and cryogenic operation ability.
Titre
Large micromirror array designed and tested for Multi-Object Spectroscopy
Publié dans
International Conference On Optical Mems And Nanophotonics (OMN)
Pagination
2
Volume
1
Pages
115-116
Présenté à
International Conference on Optical MEMS and Nanophotonics (OMN), Banff, Canada, August 6-9, 2012
Date
2012
Editeur
New York, Ieee
ISBN
978-1-4577-1513-6
Date de création de la notice
2013-02-27