Large micromirror array designed and tested for Multi-Object Spectroscopy
2012
Abstract
MEMS-based programmable slit masks are developed for multi-object spectroscopy in astronomy. Devices with 2048 tiltable micromirrors were fabricated and tested, exhibiting very good surface flatness, high contrast and cryogenic operation ability.
Details
Title
Large micromirror array designed and tested for Multi-Object Spectroscopy
Author(s)
Canonica, Michael ; Zamkotsian, Frederic ; Lanzoni, Patrick ; Noell, Wilfried
Published in
International Conference On Optical Mems And Nanophotonics (OMN)
Pagination
2
Volume
1
Pages
115-116
Conference
International Conference on Optical MEMS and Nanophotonics (OMN), Banff, Canada, August 6-9, 2012
Date
2012
Publisher
New York, Ieee
ISBN
978-1-4577-1513-6
Keywords
Other identifier(s)
View record in Web of Science
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Record creation date
2013-02-27