Precise Alignment of Individual Carbon Nanotubes for Nanoelectronics

We report optimized precise alignment of individual single-walled carbon nanotubes (SWCNTs) by the resist-assisted AC-dielectrophoresis (DEP) method. We can reproducibly control the alignment precision to sub-50 nm by customizing the critical DEP parameters, such as: applied AC signal, trapping time, solution concentration, intrinsic properties of the CNTs and so on. The self-aligned CNT field-effect transistors (FETs) have proven to be electrically robust. Therefore, this method holds promise for bottom-up fabrication of high-quality nanoelectronic devices for digital and analog applications with high yield and uniformity.


Published in:
2012 12th IEEE Conference On Nanotechnology (IEEE-Nano)
Presented at:
12th IEEE International Conference on Nanotechnology (IEEE-NANO)
Year:
2012
Publisher:
New York, IEEE
ISBN:
978-1-4673-2200-3
Laboratories:




 Record created 2013-02-27, last modified 2018-03-17


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