Plasma generation by inductive coupling with a planar resonant RF network antenna (vol 45, 082001, 2012)


Published in:
Journal Of Physics D-Applied Physics, 45, 40, 409502
Year:
2012
Publisher:
Bristol, Iop Publishing Ltd
ISSN:
0022-3727
Laboratories:
SPC
CRPP




 Record created 2013-02-27, last modified 2018-09-13


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