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research article
Optical characterization of fully programmable MEMS diffraction gratings
2012
We have fabricated and characterized fully programmable diffraction gratings consisting of 64 silicon micro-mirrors. The mirrors are 700 mu m long and 50 mu m wide with a fill factor of 90%. They are actuated electrostatically and move down by 1.25 mu m while showing negligible crosstalk and bowing as small as 0.14 mu m over 700 mu m. Extinction ratio up to 100 has been achieved by adjusting only 3 adjacent micro-mirrors. The gratings could operate either as light modulators up to 5 mu m or spectra generators up to 2.5 mu m. (C) 2012 Optical Society of America
Type
research article
Web of Science ID
WOS:000311340300035
Authors
Zamkotsian, F.
•
Timotijevic, B.
•
•
Stanley, R. P.
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Lanzoni, P.
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Luetzelschwab, M.
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•
•
Tormen, M.
Publication date
2012
Publisher
Published in
Volume
20
Issue
23
Start page
25267
End page
25274
Peer reviewed
REVIEWED
EPFL units
Available on Infoscience
February 27, 2013
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