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research article
Nanomoulding of functional materials, a versatile complementary pattern replication method to nanoimprinting
We describe a nanomoulding technique which allows low-cost nanoscale patterning of functional materials, materials stacks and full devices. Nanomoulding combined with layer transfer enables the replication of arbitrary surface patterns from a master structure onto the functional material. Nanomoulding can be performed on any nanoimprinting setup and can be applied to a wide range of materials and deposition processes. In particular we demonstrate the fabrication of patterned transparent zinc oxide electrodes for light trapping applications in solar cells.
Type
research article
Authors
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Escarré, Jordi
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Publication date
2013
Published in
Issue
71
Article Number
e50177
Note
IMT-NE Number: 686
Peer reviewed
NON-REVIEWED
EPFL units
Available on Infoscience
February 22, 2013
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