Dynamically programmable parylene-C bonding layer fluorescence for re-writable data storage on a microfluidic chip

Wafer bonding using parylene-C to Si, SiO2 and SiN surfaces has recently been shown to enable high pressure-resistant microfluidic devices with metallization and CMOS-integration capability. Here, we report characterization of intermediate parylene-C bonding layer fluorescence (iPBLF) and its use as an on-chip medium for data storage by dynamic programming of iPBLF intensity, using alternating exposure of parylene-C to UV and Green light. This technique allows data on the microfluidic chip to be read, written and erased by a fluorescent microscope and this virtually at no extra cost.


Published in:
Proc. of 16th Int. Conf. on Miniaturized Systems for Chemistry and Life Sciences (microTAS '12), 219-221
Presented at:
16th Int. Conf. on Miniaturized Systems for Chemistry and Life Sciences (microTAS '12), Okinawa, Japan, October 28 - November 1, 2012
Year:
2012
Keywords:
Laboratories:




 Record created 2013-01-25, last modified 2018-03-17


Rate this document:

Rate this document:
1
2
3
 
(Not yet reviewed)