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  4. Large-area compatible fabrication and encapsulation of inkjet-printed humidity sensors on flexible foils with integrated thermal compensation
 
research article

Large-area compatible fabrication and encapsulation of inkjet-printed humidity sensors on flexible foils with integrated thermal compensation

Molina-Lopez, F.  
•
Vasquez Quintero, A.
•
Mattana, G.  
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2013
Journal of Micromechanics and Microengineering

This work presents the simultaneous fabrication of ambient relative humidity (RH) and temperature sensors arrays, inkjet-printed on flexible substrates and subsequently encapsulated at foil level. These sensors are based on planar interdigitated capacitors with an inkjet-printed sensing layer and meander-shaped resistors. Their combination allows the compensation of the RH signals variations at different temperatures. The whole fabrication of the system is carried out at foil level and involves the utilization of additive methods such as inkjet-printing and electrodeposition. Electrodeposition of the printed lines resulted in an improvement of the thermoresistors. The sensors have been characterized and their performances analyzed. The encapsulation layer does not modify the performances of the sensors in terms of sensitivity or response time. This work demonstrates the potential of inkjet-printing in the large-area fabrication of light-weight and cost-efficient gas sensors on flexible substrates.

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Type
research article
DOI
10.1088/0960-1317/23/2/025012
Web of Science ID

WOS:000313752800012

Author(s)
Molina-Lopez, F.  
Vasquez Quintero, A.
Mattana, G.  
Briand, D.  
de Rooij, N. F.  
Date Issued

2013

Publisher

Iop Publishing Ltd

Published in
Journal of Micromechanics and Microengineering
Volume

23

Issue

2

Article Number

025012

Editorial or Peer reviewed

NON-REVIEWED

Written at

EPFL

EPFL units
SAMLAB  
Available on Infoscience
January 25, 2013
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/88185
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