Off-Axis Texture and Crystallographic Accommodation in Multicomponent Nitride Thin Films Deposited by Pulsed Magnetron Sputtering


Advisor(s):
Forró, László
Karimi, Ayat
Year:
2012
Publisher:
Lausanne, EPFL
Keywords:
Other identifiers:
urn: urn:nbn:ch:bel-epfl-thesis5547-8
Laboratories:




 Record created 2012-12-05, last modified 2018-01-28

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