Formation Mechanisms and Structural Properties of Aluminium-Chromium Based Oxynitride Thin Films Synthesized by Physical Vapor Deposition


Advisor(s):
Forró, László
Karimi, Ayat
Year:
2012
Publisher:
Lausanne, EPFL
Keywords:
Other identifiers:
urn: urn:nbn:ch:bel-epfl-thesis5538-8
Laboratories:


Note: The status of this file is: EPFL only


 Record created 2012-12-05, last modified 2018-05-01

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