Concurrent polarization retrieval in multiheterodyne scanning near-field optical microscopy: validation on silicon formbirefringent grating

We demonstrate a concurrent polarization-retrieval algorithm based on a multi-heterodyne scanning near-field optical microscopy (MHSNOM) measurement system. This method relies on calibration of the polarization properties of the MH-SNOM using an isotropic region of the sample in the vicinity of the nanostructures of interest. We experimentally show the effectiveness of the method on a silicon form-birefringent grating (FBG) with significant polarization diversity. Three spatial dimensional near-field measurements are in agreement with theoretical predictions obtained with rigorous coupled-wave analysis (RCWA). Pseudo-far-field measurements are performed to obtain the effective refractive index of the FBG, emphasizing the validity of the proposed method. This reconstruction algorithm makes the MH-SNOM a powerful tool to analyze concurrently the polarization-dependent near-field optical response of nanostructures with sub wavelength resolution as long as a calibration area is available in close proximity.


Published in:
Optics Express, 20, 21, 23088-23099
Year:
2012
Publisher:
Washington, Optical Society of America
ISSN:
1094-4087
Keywords:
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 Record created 2012-11-19, last modified 2018-03-17

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