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conference paper
Investigating reflow and wetting of non-circular nano-pillars to study nano-scale solid immersion lens fabrication
2012
Proceedings of the EOS Annual Meeting 2012
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Name
eosam2012_tom4 - Toralf Scharf - 5996.pdf
Access type
openaccess
Size
170.34 KB
Format
Adobe PDF
Checksum (MD5)
9faa037b56cb2c8ec06d3c9cd52cfc25