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conference paper
Micro-fabricated alkali vapor cells sealed at low temperatures with thin-film metallic bonding
2012
2012 IEEE International Frequency Control Symposium Proceedings
We report on the characterization of micro-fabricated alkali vapor cells, sealed by low-temperature thin-film metallic bonding. The low sealing temperatures ≤ 140°C are of high interest in view of future micro-fabricated cells using anti-relaxation wall coatings. Long-term measurements using saturated-absorption and double-resonance spectroscopy show a stable pressure inside the cells and therefore an excellent hermeticity of the bonding over several months. This is also confirmed by independent leak-rate measurements of indium bonded sample cells by a membrane deflection method.
Type
conference paper
Authors
Publication date
2012
Publisher
Published in
2012 IEEE International Frequency Control Symposium Proceedings
Volume
1
Start page
1
End page
4
Peer reviewed
NON-REVIEWED
EPFL units
Event name | Event place | Event date |
Baltimore, USA | May 21-24, 2012 | |
Available on Infoscience
September 3, 2012
Use this identifier to reference this record