Infoscience

Conference paper

Miniaturised flexible temperature sensor

Moser, Y.; Gijs, M. A. M.
  • Presented at: 14th International Conference on Solid-State Sensors, Actuators and Microsystems, Lyon, FRANCE, Jun 10-14, 2007
  • Published in: Transducers '07 & Eurosensors Xxi, Digest Of Technical Papers, Vols 1 And 2 (ISBN: 978-1-4244-0841-2), p. U1148-U1149
  • Ieee Service Center, 445 Hoes Lane, Po Box 1331, Piscataway, Nj 08855-1331 Usa, 2007

We propose a microfabrication technology for a flexible temperature sensor with a 100x100 mu m(2) sensing area and a probe length of 7 cm. We use a biocompatible new high temperature-resistant polyimide (U-Vamish-S, Ube, Dosseldorf, Germany) to embed a thin film platinum resistor as sensing element. The sensor is operational from 0 degrees C up to 400 degrees C with an accuracy of +/- 1 degrees C at high temperatures and has a time constant of 0.05 seconds. This sensor was designed for temperature characterisation of hot steam injected for thermo-ablation of tumors via a micro-needle.

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