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conference paper
Aging and internal stresses issues in MEMS
2000
1st Korea-Switzerland Sympos. on Materials and Interfaces in MEMS Applications (KAIST)
Type
conference paper
Authors
Publication date
2000
Published in
1st Korea-Switzerland Sympos. on Materials and Interfaces in MEMS Applications (KAIST)
Peer reviewed
REVIEWED
EPFL units
Available on Infoscience
June 29, 2012
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