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conference paper
Durability of thin PECVD SiOx coatings on polymer films
1998
Society of Vacuum Coaters 41st Ann. Conf.
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Type
conference paper
Authors
Publication date
1998
Publisher
Published in
Society of Vacuum Coaters 41st Ann. Conf.
Peer reviewed
REVIEWED
EPFL units
Available on Infoscience
June 29, 2012