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conference paper
Durability of thin PECVD SiOx coatings on polymer films
1998
Society of Vacuum Coaters 41st Ann. Conf.
Type
conference paper
Authors
Publication date
1998
Publisher
Published in
Society of Vacuum Coaters 41st Ann. Conf.
Peer reviewed
REVIEWED
EPFL units
Available on Infoscience
June 29, 2012
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