A Navigation-Grade MEMS Accelerometer based on a Versatile Front End

This paper presents a MEMS-based 5th-order Delta Sigma capacitive accelerometer. The Delta Sigma loop is implemented in mixed signal, the global 5th-order filter having a 2nd-order analog and a 3rd-order digital part. The system can be used with a wide range of sensors, because the mixed-signal front-end is programmable. The developed ASIC comprises a voltage-mode preamplifier, two parallel demodulators implementing CDS, and a 7-bit internally non-linear flash ADC. The latter drives a 3rd-order digital filter which can be configured for different sensor parameters in order to ensure overall loop stability and to optimize the noise performance. With a low-noise MEMS sensor, the system achieves a 19-bit DR and a 16-bit SNR, both over a 300-Hz bandwidth.


Published in:
Iecon 2011: 37Th Annual Conference On Ieee Industrial Electronics Society, 4038-4043
Presented at:
ICELIE/IES Industry Forum/37th Annual Conference of the IEEE Industrial-Electronics-Society (IECON), Melbourne, AUSTRALIA, Nov 07-10, 2011
Year:
2011
Publisher:
Ieee Service Center, 445 Hoes Lane, Po Box 1331, Piscataway, Nj 08855-1331 Usa
ISBN:
978-1-61284-972-0
Keywords:
Laboratories:




 Record created 2012-06-25, last modified 2018-01-28


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