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conference paper
A Dual-Axis High Fill-Factor Micromirror Array for High Thermal Loads
2011
Omn2011: 16Th International Conference On Optical Mems And Nanophotonics
A high fill-factor, dual-axis micromirror array with novel spring and actuator design is developed for high thermal load applications. Each pixel can attain an omnidirectional mechanical DC rotation angle of +/- 4 degrees.
Type
conference paper
Web of Science ID
WOS:000297850100055
Authors
Publication date
2011
Published in
Omn2011: 16Th International Conference On Optical Mems And Nanophotonics
ISBN of the book
978-1-4577-0336-2
Start page
135
End page
136
Peer reviewed
NON-REVIEWED
EPFL units
Event name | Event place | Event date |
Istanbul, Turquie | Aug 08-11, 2011 | |
Available on Infoscience
June 12, 2012
Use this identifier to reference this record