Addressable MEMS slit mask for multi-object spectroscopy based on multi-wafer stacking

MEMS-based programmable slit masks are developed for multi-object spectroscopy in astronomy. Devices with 2048 tiltable micromirrors were fabricated using multiple wafer-level bonding and implemented with individual addressing of each element.


Published in:
Omn2011: 16Th International Conference On Optical Mems And Nanophotonics, 1, 129-130
Presented at:
16th International Conference on Optical MEMS and Nanophotonics (OMN), Istanbul, Turquie, Aug 08-11, 2011
Year:
2011
Publisher:
Ieee Service Center, 445 Hoes Lane, Po Box 1331, Piscataway, Nj 08855-1331 Usa
ISBN:
978-1-4577-0336-2
Keywords:
Laboratories:




 Record created 2012-06-12, last modified 2018-09-13


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