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conference paper
3D sequential integration: a key enabling technology for heterogeneous co-integration of new function with CMOS
2012
Proceedings of the IEEE Circuits and Systems Society Forum on Emerging and Selected Topics (CAS-FEST)
Type
conference paper
Authors
Publication date
2012
Published in
Proceedings of the IEEE Circuits and Systems Society Forum on Emerging and Selected Topics (CAS-FEST)
Peer reviewed
NON-REVIEWED
EPFL units
Event name | Event place | Event date |
Seoul, South Korea | May 20, 2012 | |
Available on Infoscience
May 7, 2012
Use this identifier to reference this record