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research article
In situ core level and valence band photoelectron spectroscopy of reactively sputtered titanium aluminum nitride films
2001
Type
research article
Authors
Publication date
2001
Published in
Volume
63
Issue
11
Start page
115413/1
End page
8
Peer reviewed
REVIEWED
EPFL units
Available on Infoscience
May 4, 2012
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