Kinetics of a-Si:H bulk defect and a-Si:H/c-Si interface-state reduction
Low-temperature annealing of hydrogenated amorphous silicon (a-Si:H) is investigated. An identical energy barrier is found for the reduction of deep defects in the bulk of a-Si:H films and at the interface such layers form with crystalline Si (c-Si) surfaces. This finding gives direct physical evidence that the defects determining a-Si:H/c-Si interface recombination are silicon dangling bonds and that also kinetically this interface has no unique features compared to the a-Si:H bulk.
IMT-NE Number: 654
Record created on 2012-04-12, modified on 2016-08-09