Infoscience
Strain as a CMOS technology booster
2009
10
Strain
Local stressor
Global stressor
CMOS booster
CMOS downscaling
Contact etch stop lay...
Shallow trench isolat...
Strained SOI
Metal gate strain
Stress memorization t...
Local oxidation
Diamond like carbon (...
Uniaxial/biaxial tens...
Carrier mobility boos...
Epitaxial S/D
Silicidation
longitudinal/transver...
Grade: 6.0/6.0.