Straight silicon tube for density and mass flow sensing (fabrication, modeling and evaluation)
The aim of this project work is to fabricate and evaluate a resonating silicon tube as a density and a Coriolis-based mass flow sensor. This project consists of three course works: a project work, a microelectronics project, and a master thesis. At first, the licenses needed to work with the clean room facilities were obtained. Several process steps were optimized/calibrated and finally, the first prototypes were fabricated. The fixtures and the electrodes were prepared. A quantitative model for the density/Coriolis mass flow sensor was derived. Several parameters like density sensitivity, pull-in-voltage, Q-factor, resonance frequency, burst pressure, the amplitude of Coriolis effect were investigated/formulated/calculated. An electrical-optical setup was prepared to evaluate the tube as a density sensor. The first three vibration modes were calibrated and the important parameters of a densitometer, quality factor and fluid density sensitivity, were measured. Several sources of loss were investigated. The effect of viscosity and flow were investigated and finally, the results were published in a journal paper and two conference papers. An optical-electrical setup was designed and implemented to detect the Coriolis effect using geometrical optics and MATLAB calculations. Detecting this effect and evaluating the mass flow sensor are the next steps.
- URL: http://publications.lib.chalmers.se/publication/61575-straight-silicon-tube-for-density-and-mass-flow-sensing-fabrication-modeling-and-evaluation
Keywords: Fluid-conveying Si microtube ; Bridge resonator ; Fluid density sensor ; Laser Doppler Vibrometry ; Optical/electrical characterization methods in microscale ; Capacitive detection method ; Coriolis-based mass flow sensor
Record created on 2012-03-05, modified on 2016-08-09