000175146 001__ 175146
000175146 005__ 20181203022639.0
000175146 0247_ $$2doi$$a10.1063/1.3663070
000175146 022__ $$a0034-6748
000175146 02470 $$2ISI$$a000297941100032
000175146 037__ $$aARTICLE
000175146 245__ $$aCompensator design for improved counterbalancing in high speed atomic force microscopy
000175146 260__ $$bAmerican Institute of Physics$$c2011
000175146 269__ $$a2011
000175146 336__ $$aJournal Articles
000175146 520__ $$aHigh speed atomic force microscopy can provide the possibility of many new scientific observations and applications ranging from nano-manufacturing to the study of biological processes. However, the limited imaging speed has been an imperative drawback of the atomic force microscopes. One of the main reasons behind this limitation is the excitation of the AFM dynamics at high scan speeds, severely undermining the reliability of the acquired images. In this research, we propose a piezo based, feedforward controlled, counter actuation mechanism to compensate for the excited out-of-plane scanner dynamics. For this purpose, the AFM controller output is properly filtered via a linear compensator and then applied to a counter actuating piezo. An effective algorithm for estimating the compensator parameters is developed. The information required for compensator design is extracted from the cantilever deflection signal, hence eliminating the need for any additional sensors. The proposed approach is implemented and experimentally evaluated on the dynamic response of a custom made AFM. It is further assessed by comparing the imaging performance of the AFM with and without the application of the proposed technique and in comparison with the conventional counterbalancing methodology. The experimental results substantiate the effectiveness of the method in significantly improving the imaging performance of AFM at high scan speeds. (C) 2011 American Institute of Physics. [doi: 10.1063/1.3663070]
000175146 6531_ $$aReal-Time
000175146 700__ $$aBozchalooi, I. S.
000175146 700__ $$aYoucef-Toumi, K.
000175146 700__ $$aBurns, D. J.
000175146 700__ $$g199129$$aFantner, G. E.$$0244716
000175146 773__ $$j82$$tReview of Scientific Instruments$$k11$$q113712
000175146 909C0 $$xU12183$$0252332$$pLBNI
000175146 909CO $$pSTI$$particle$$ooai:infoscience.tind.io:175146
000175146 917Z8 $$x202057
000175146 937__ $$aEPFL-ARTICLE-175146
000175146 973__ $$rREVIEWED$$sPUBLISHED$$aEPFL
000175146 980__ $$aARTICLE