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conference paper
Capacitive pressure microsensor fabricated by bulk micromachining and sacricial layer etching
2006
Proceeding of the 32nd Annual Conference of the IEEE Industrial Electronics Society, IECON 06
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Name
04153351_Luque_IECON_2006.pdf
Type
Postprint
Access type
restricted
Size
774.61 KB
Format
Adobe PDF
Checksum (MD5)
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