Capacitive pressure microsensor fabricated by bulk micromachining and sacricial layer etching


Published in:
Proceeding of the 32nd Annual Conference of the IEEE Industrial Electronics Society, IECON 06, 32, 2969 - 2974
Presented at:
32nd Annual Conference of the IEEE Industrial Electronics Society, IECON 06, Paris, France, November 9-11, 2006
Year:
2006
ISBN:
1-4244-0390-1
Laboratories:


Note: The status of this file is: EPFL only


 Record created 2012-02-13, last modified 2018-09-13

Postprint:
Download fulltext
PDF

Rate this document:

Rate this document:
1
2
3
 
(Not yet reviewed)