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  4. Generalization of the Concept of Equivalent Thickness and Capacitance to Multigate MOSFETs Modeling
 
research article

Generalization of the Concept of Equivalent Thickness and Capacitance to Multigate MOSFETs Modeling

Chevillon, Nicolas
•
Sallese, Jean-Michel  
•
Lallement, Christophe
Show more
2012
IEEE Transactions on Electron Devices

In this letter, we propose to introduce the notion of equivalent capacitance and to generalize the so-called equivalent-thickness concept to model arbitrary shapes of lightly doped nonplanar multigate MOSFETs, without the need to introduce any unphysical parameter. These definitions, which merely map a multigate geometry into the symmetric double-gate (DG) MOS-FET topology, have been validated by extensive comparison with 3-D numerical simulations of quadruple-gate, triple-gate (TG), triangular gate, cylindrical gate-all-around, and DG Fin Field Effect Transistors (FinFETs). Based on this modeling approach, any multigate architecture inherits of the fundamental relationships that have been developed for planar DG MOSFETs, including the normalization of all electrical quantities that considerably simplifies its analysis. In addition, considering a constant mobility, we find that the model can predict electrical characteristics of FinFETs from 275 to 425 K, without the need for any additional parameters. Finally, we were able to predict electrical measurements of a TG MOSFET, making of this generic model an interesting candidate for a design-oriented compact model for arbitrary multigate MOSFETs geometries.

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Type
research article
DOI
10.1109/TED.2011.2171347
Web of Science ID

WOS:000298756100010

Author(s)
Chevillon, Nicolas
•
Sallese, Jean-Michel  
•
Lallement, Christophe
•
Pregaldiny, Fabien
•
Madec, Morgan
•
Sedlmeir, Josef
•
Aghassi, Jasmin
Date Issued

2012

Published in
IEEE Transactions on Electron Devices
Volume

59

Start page

60

End page

71

Subjects

MOS devices

•

semiconductor device modeling

•

semiconductor devices

•

Surrounding-Gate Mosfets

•

Soi Mosfets

•

Dg-Mosfet

•

Inversion

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
EDLAB  
Available on Infoscience
February 9, 2012
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/77641
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