Repository logo

Infoscience

  • English
  • French
Log In
Logo EPFL, École polytechnique fédérale de Lausanne

Infoscience

  • English
  • French
Log In
  1. Home
  2. Academic and Research Output
  3. Conferences, Workshops, Symposiums, and Seminars
  4. Horizontally and on-site grown carbon nanotube membrane for sensitive and selective gas sensing
 
conference paper

Horizontally and on-site grown carbon nanotube membrane for sensitive and selective gas sensing

Guerin, Hoël
•
Tsamados, Dimitrios
•
Le Poche, Hélène
Show more
2011
Proceedings of the 37th International Conference on Micro & Nano Engineering
37th International Conference on Micro & Nano Engineering

We report here the fabrication of a sensitive and selective gas sensor using a carbon nanotube (CNT) membrane as the gas sensing transducer. A TiN/Al2O3/TiN stack is used as a support for the CNT growth catalyst, evaporated with a 45° tilt angle on the vertical wall. Thanks to this layout, dense and thin arrays of aligned and horizontal CNTs are grown, both selectively and on-site, in between interdigited electrodes. These features allow better gas limit detection with working conditions close to room temperature and atmospheric pressure. The FET or switch like structure of the sensor allows multiple readouts (conductance, capacitance, resonance) to achieve a better selectivity for gas detection.

  • Details
  • Metrics
Type
conference paper
Author(s)
Guerin, Hoël
Tsamados, Dimitrios
Le Poche, Hélène
Dijon, Jean
Ionescu, Mihai Adrian  
Date Issued

2011

Published in
Proceedings of the 37th International Conference on Micro & Nano Engineering
Subjects

carbone nanotube membrane

•

horizontal and selective CVD growth

•

gas sensor

•

FP7 e-BRAINS

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
NANOLAB  
Event nameEvent placeEvent date
37th International Conference on Micro & Nano Engineering

Berlin, Germany

September 19-23, 2011

Available on Infoscience
February 8, 2012
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/77589
Logo EPFL, École polytechnique fédérale de Lausanne
  • Contact
  • infoscience@epfl.ch

  • Follow us on Facebook
  • Follow us on Instagram
  • Follow us on LinkedIn
  • Follow us on X
  • Follow us on Youtube
AccessibilityLegal noticePrivacy policyCookie settingsEnd User AgreementGet helpFeedback

Infoscience is a service managed and provided by the Library and IT Services of EPFL. © EPFL, tous droits réservés