Fabrication of Polymer-Based Micro Devices: Formulation and Study of the Paste

We investigate in the present work the fabrication of polymer-based micro-fluidic and micro-mechanical devices using sacrificial, resistive/conductive pastes, through a screen-printing process. An organic sacrificial paste is first screen-printed onto a substrate, the future opening in the structure existing where the paste lies (channels, cavities.). Then, a resistive paste based on thermosetting polymer resin and graphite is deposited onto the previous layer. Finally, the sacrificial paste is removed at 150 C by sublimation through the composite, leaving therefore the desired pattern. For such applications, the key is naturally the formulation of the pastes. On a previous work, we already proposed a potential formulation for the organic sacrificial paste, based on polyols [1]. In the present paper, we will focus on the formulation of the cover paste, which must be adapted rheologically for the screen-printing process, but also chemically due to strong potential interactions between the sacrificial layer and the over-layer. Finally, micro-devices such as simple fluidic channels and suspended structures were produced and shown to be operational, demonstrating the high potential of our process. (C) 2010 Published by Elsevier Ltd.

Published in:
Eurosensors Xxiv Conference, 5, 874-877
Presented at:
24th Eurosensor Conference, Linz, AUSTRIA, Sep 05-08, 2010
Elsevier Science, Reg Sales Off, Customer Support Dept, 655 Ave Of The Americas, New York, Ny 10010 Usa

 Record created 2012-01-10, last modified 2018-02-13

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