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  4. Test structure and method for the experimental investigation of internal voltage amplification and surface potential of ferroelectric MOSFETs
 
conference paper

Test structure and method for the experimental investigation of internal voltage amplification and surface potential of ferroelectric MOSFETs

Rusu, Alexandru  
•
Salvatore, Giovanni A.  
•
Ionescu, Adrian M.  
2010
Solid-State Electronics
40th European Solid-State Device Research Conference (ESSDERC)/36th European Solid-State Circuits Conference (ESSCIRC)

In this paper we report the fabrication and detailed electrical characterization of a novel test structure based on Metal-Ferroelectric-Metal-Oxide-Semiconductor transistor with internal metal contact, aiming at extracting the surface potential and the investigation of internal voltage. This structure could possibly be used for the investigation of the differential voltage amplification expected due to negative capacitance effect. The proposed test structure is p-Fe-FET with a thin Al contact in-between the PVDF ferroelectric and a pedestal oxide, enabling access to the internal voltage potential in all the regimes of operations, from weak to strong inversion. Moreover, the capacitances of reference MOS transistor and of Fe-FET can be independently probed. The fabricated p-type Fe-FET has an excellent subthreshold slope of 75 mV/decade, I-on/I-off > 10(7) and I-off in the pA range. Based on voltage and capacitive measurements, the Fe-FET surface potential is experimentally extracted as well as the polarization of the ferroelectric layer. We demonstrate that the internal node voltage amplitude can be controlled by the sweeping conditions of the polarization loops. We propose a first order modeling of the polarization and we report simulations of the internal potential. (C) 2011 Elsevier Ltd. All rights reserved.

  • Details
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Type
conference paper
DOI
10.1016/j.sse.2011.06.038
Web of Science ID

WOS:000297182700024

Author(s)
Rusu, Alexandru  
Salvatore, Giovanni A.  
Ionescu, Adrian M.  
Date Issued

2010

Published in
Solid-State Electronics
Volume

65-66

Start page

151

End page

156

Subjects

Ferroelectric

•

Test structure

•

Polarization

•

Negative capacitance

•

Surface potential

•

Pvdf

•

P(VDF-TrFE)

Editorial or Peer reviewed

NON-REVIEWED

Written at

EPFL

EPFL units
NANOLAB  
Event nameEvent placeEvent date
40th European Solid-State Device Research Conference (ESSDERC)/36th European Solid-State Circuits Conference (ESSCIRC)

Seville, SPAIN

Sep 14-16, 2010

Available on Infoscience
December 29, 2011
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/76190
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