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conference paper
Integration of Coplanar Barium-Strontium Titanate Tunable Capacitors on Micro-Machined Silicon
2010
Integrated Ferroelectrics
The fabrication and characterization of coplanar Barium-Strontium Titanate capacitors on Silicon are described. Micromachining was used to reduce parasitic effects stemming from the substrate, thus enhancing the performance of the device.
Type
conference paper
Web of Science ID
WOS:000285057400013
Author(s)
Date Issued
2010
Journal
Integrated Ferroelectrics
Volume
115
Start page
110
End page
119
Peer reviewed
NON-REVIEWED
Written at
EPFL
EPFL units
| Event name | Event place | Event date |
Delhi, INDIA | Dec 13-17, 2009 | |
Available on Infoscience
December 16, 2011
Use this identifier to reference this record