Integration of Coplanar Barium-Strontium Titanate Tunable Capacitors on Micro-Machined Silicon
Noeth, A.; Yamada, T.; Tagantsev, A. K.; Setter, N.
2010

Abstract

The fabrication and characterization of coplanar Barium-Strontium Titanate capacitors on Silicon are described. Micromachining was used to reduce parasitic effects stemming from the substrate, thus enhancing the performance of the device.

Details

Title Integration of Coplanar Barium-Strontium Titanate Tunable Capacitors on Micro-Machined Silicon
Author(s) Noeth, A. ; Yamada, T. ; Tagantsev, A. K. ; Setter, N.
Published in Integrated Ferroelectrics
Volume 115
Pages 110-119
Conference International Conference on Electroceramics (ICE-2009), Delhi, INDIA, Dec 13-17, 2009
Date 2010
Keywords
DOI https://doi.org/10.1080/10584587.2010.488560
Other identifier(s) View record in Web of Science
Laboratories LC
Record Appears in Scientific production and competences > STI - School of Engineering > STI Archives > LC - Ceramics Laboratory
Conference Papers
Work produced at EPFL
Published
Record creation date 2011-12-16

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